Orn Jonsson
Member
Hi All,
I am looking for an economical solution to setting up a 2-3 axis Linear motion servo transfer system.
This will be used in a clean room to transfer a wafer boat from one bath to another and another etc. (up to 12 baths in one line)based on time and/or resistivity of the medium in the baths.
The user interface has to be very flexible and user friendly, and the motion controller must be able to read and write to the user interface (probably via a PLC).
I know that Parker6K series will talk to AB SLC 5/05 but both controller and PLC are rather costly.
I have used Delta RMC controllers with AB SLC 500 but again both are rather costly.
Any suggestions will be appreciated,
OJ
I am looking for an economical solution to setting up a 2-3 axis Linear motion servo transfer system.
This will be used in a clean room to transfer a wafer boat from one bath to another and another etc. (up to 12 baths in one line)based on time and/or resistivity of the medium in the baths.
The user interface has to be very flexible and user friendly, and the motion controller must be able to read and write to the user interface (probably via a PLC).
I know that Parker6K series will talk to AB SLC 5/05 but both controller and PLC are rather costly.
I have used Delta RMC controllers with AB SLC 500 but again both are rather costly.
Any suggestions will be appreciated,
OJ